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Schematic diagram of the experimental apparatus. (1. argon; 2. flowStream lines of the argon gas flow for gas flow rates of a) 10 l/min Argon bohr model3d render of atom structure of argon isolated over white background.
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Argon structure atom 3d render isolated electrons protons background over white alamy
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Sketches illustrating three scenarios for argon implantation. (a) argonArgon flow for (a) initial purging and (b) regular operation .








